JPH0626841Y2 - 薄膜の強度測定装置 - Google Patents
薄膜の強度測定装置Info
- Publication number
- JPH0626841Y2 JPH0626841Y2 JP17256786U JP17256786U JPH0626841Y2 JP H0626841 Y2 JPH0626841 Y2 JP H0626841Y2 JP 17256786 U JP17256786 U JP 17256786U JP 17256786 U JP17256786 U JP 17256786U JP H0626841 Y2 JPH0626841 Y2 JP H0626841Y2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- probe
- thin film
- operating rod
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 20
- 239000000523 sample Substances 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 7
- 238000006748 scratching Methods 0.000 claims description 6
- 230000002393 scratching effect Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 13
- 239000010408 film Substances 0.000 description 9
- 239000012528 membrane Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Adjustable Resistors (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17256786U JPH0626841Y2 (ja) | 1986-11-12 | 1986-11-12 | 薄膜の強度測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17256786U JPH0626841Y2 (ja) | 1986-11-12 | 1986-11-12 | 薄膜の強度測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6379556U JPS6379556U (en]) | 1988-05-26 |
| JPH0626841Y2 true JPH0626841Y2 (ja) | 1994-07-20 |
Family
ID=31109225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17256786U Expired - Lifetime JPH0626841Y2 (ja) | 1986-11-12 | 1986-11-12 | 薄膜の強度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0626841Y2 (en]) |
-
1986
- 1986-11-12 JP JP17256786U patent/JPH0626841Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6379556U (en]) | 1988-05-26 |
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